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The focal point
of a port, also referred to as a ports target point, is usually a position
anywhere inside a vacuum chamber where an application task is to be performed. Its
location is typically defined by the vertex or convergence point of one or
more ports and other chamber features. Focal points can be thought of as sphere centers from which
radial ports project. Even though focal points are inside a vacuum chamber they are
not necessarily at the chamber’s center. Chambers can contain multiple focal points
as required by an application. All focal points are located on focal planes which are
parallel to the chamber’s main base plane. A port’s focal length is defined as
an axial and perpendicular distance measured from a port’s focal point to the center of its
mounting flange seal face. Minimum focal lengths require the use of tapped flanges.
Clearance hole flanges require a minimum 1-1/2 inch tube extension in order to fit
fastening hardware.
Polar angle is a port’s angular displacement about a horizontal
axis. This horizontal axis of rotation intersects the port’s focal point
and lays on the focal plane which is in turn perpendicular to the chamber’s main Z axis.
Polar angles are measured in a north to south direction on a 180° scale between the
focal point’s vertical axis and the port’s center line, figures 4, 5 and 6
on facing page. The north position is 0° and the south position is 180°. A port is said to have a 90°
polar angle when the port centerline lays on the focal plane, figure 4.
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