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MDC’s 3kW Electron Beam Source is a versatile and economical deposition tool used for
thin film coating processes in high and ultrahigh vacuum environments. The e-Vap® 3000 system
evaporates virtually all rare earth refractory and dielectric materials. It provides
researchers a simple, relatively low-cost means of depositing high purity thin film coatings. The source is
manufactured using all metal sealed gaskets, is extremely compact and has a high level of
ruggedness, reliability and efficiency. The compact source design allows the entire source
assembly to fit through a 2.75" Del-Seal™ CF port opening and eliminates internal water and
electrical connections. This 3kW source is available free standing or as a complete
turnkey system. The filament/emitter assembly has a heat-sink and features a unique single piece high
voltage insulator design. The entire emitter assembly slides out for easy maintenance.
A new 3kW Switching Power Supply is available to drive these miniature
sources. State-of-the-art switching technology renders a compact rack mountable power supply. The built-in source controller also
employs switching technology and provides extremely accurate power control. MDC recommends using crucible liners with all e-Vap® evaporation sources. These liners offer improved thermal stability
while reducing the transfer of heat to the crucible. Liners provide the ability to easily and quickly switch evaporant materials
without removing the crucible for cleaning. They also reduce power requirements to achieve specific evaporation rates.
For detailed list of crucible liner materials go to crucible
liners.
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